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reactive ion plating

网络离子反应镀

reactive ion plating

reactive ion plating

reactive ion plating

离子反应镀

离子反应镀,Reactive ion... ... ) ion 离子 ) Reactive ion plating 离子反应镀 ) Ion Beam Implantation 离子束离子注入 ...

1

Initial Mechanism Discuss on Synthesis of AlN Thin Film by Activated Reactive Ion Plating with Cathode Arc Source Assisted by Electrons Bath

电子浴辅助阴极电弧源法合成 AlN 薄膜机理初探

2

Technology Optimization of Reactive Ion Plating for AlN Film and Its Analysis

AlN 薄膜的离子反应镀工艺优化及分析

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